Enhanced Spatial PEB Uniformity through a Novel Bake Plate Design | Semantic Scholar
Contact local CD uniformity optimization through etch shrink
In-field CD uniformity (CDU) of 32nm HP L/S pattern. | Download Scientific Diagram
a) Across wafer CD uniformity for 110 nm wide (nominal) feature after... | Download Scientific Diagram
Across Wafer Critical Dimension Uniformity Enhancement Through Lithography and Etch Process Sequence: Concept, Approach, Modeling, and Experiment | Semantic Scholar
Photomask
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Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration - ScienceDirect
CD uniformity maps obtained using the optical technique described... | Download Scientific Diagram
CD Uniformity comparison of random contact windows with ArF and KrF... | Download Scientific Diagram
Intrawafer CD uniformity trend for Etch GATE in 40nm > 30% CD... | Download Scientific Diagram
Intel and Nikon Litho Specialists Discuss Overlay Matching and Edge Placement Error for Production Beyond 20 nm
Comprehensive CD Uniformity Control in Lithography and Etch Process - ppt download
Process Setup and Optimization • LithExx-Systems
Extreme ultraviolet lithography reticle local CD uniformity correlation to wafer local CD uniformity
Global ASI CD uniformity comparison between n&k R-T Scatterometer and... | Download Scientific Diagram
Requirement for mask CD uniformity and mask induced overlay error. | Download Scientific Diagram
Effect of Wetting Time on CD Uniformity in Immersion Lithography
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n&k CD (nm) Uniformity Map Figure 20. n&k Depth (nm) Uniformity Map | Download Scientific Diagram
